Glovebox

Thermal Evaporator
Option

  • Source


  • > (Organic or Metal) 2set
  • > (Organic or Metal) 3set
  • > (Organic or Metal) 4set

  • Sample Rotation




    Sample Rotation



  • Sample Rotation
    [Specification]

  • - Sample Holder Design for Easy Sample Replacement
  • - Optimal Design for Improved Deposition Uniformity
  • - AC Motor & Motor Controller : 1 Set
  • - Rotation Speed : 1 ~ 20 rpm
  • - Sample Heating (Up to 300 ℃) / Cooling (Down to 5 ℃) Available




  • Sample Backside Cooling





    Sample Backside Cooling



  • Sample Backside Cooling
  • Sample Holder Design for Easy Sample Replacement
  • Optimal Design for Improved Deposition Uniformity
  • AC Motor & Motor Controller : 1 Set
  • Rotation Speed : 1 ~ 20 rpm
  • Sample Chuck Ass’y for Sample & Substrate Contact
  • Cool Down Temp. : 5 ~ 10 ℃
  • Special Cooling Block Cool Down Temp. : - 170 ℃
  • Solenoid Valve Ass’y for Water Flow On/Off & Water Purge



  • Sample Heating




    Sample Heating



  • Sample Heating
  • Improve surface resistance
  • Improved deposition adhesion
  • Sample Holder Design for Easy Sample Replacement
  • Optimal Design for Improved Deposition Uniformity
  • AC Motor & Motor Controller : 1 Set
  • Rotation Speed : 1 ~ 20 rpm
  • Heating Element : Halogen Lamp
  • Heat Up Temp. : ~ 300 ℃