Koreakiyon

Kiyon offers customized Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.
Process Chamber Dimension	450(L)X355(H)X(450)
Sample Size	Piece to Max 170mm * 170mm Glass
Chamber Ultimate Pressure	Below than 3.0 x 10^-7 Torr
Chamber Working Pressure	Below than 5.0 x 10^-6 Torr within 30 Minutes
Film Thickness Uniformity	<+/-5% within 170mm * 170mm Glass
Front Door for Sample Loading & Source Refill In Glovebox Condition
Rear Side Door for Chamber Maintenance & Cleaning (Without Destroying The Condition of The Glovebox)
System Fully Automation Control by PC Control Available
System Semiauto Control & Manual Control by PLC Based Touch Control (10.5“ Touch Panel) : Auto Pumping, Auto Venting, Auto System Shut Down
Auto Deposition Control & Co-deposition Process Available
Sample Heating (Up to 300 ℃) / Cooling ( Down to 5 ℃ ) Available

Kiyon offers customized Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.

Process Chamber Dimension

450(L)X355(H)X(450)

Sample Size

Piece to Max 170mm * 170mm Glass

Chamber Ultimate Pressure

Below than 3.0 x 10^-7 Torr

Chamber Working Pressure

Below than 5.0 x 10^-6 Torr within 30 Minutes

Film Thickness Uniformity

<+/-5% within 170mm * 170mm Glass

Front Door for Sample Loading & Source Refill In Glovebox Condition

Rear Side Door for Chamber Maintenance & Cleaning (Without Destroying The Condition of The Glovebox)

System Fully Automation Control by PC Control Available

System Semiauto Control & Manual Control by PLC Based Touch Control (10.5“ Touch Panel) :
Auto Pumping, Auto Venting, Auto System Shut Down

Auto Deposition Control & Co-deposition Process Available

Sample Heating (Up to 300 ℃) / Cooling ( Down to 5 ℃ ) Available

Glovebox