Glovebox

Thermal Evaporator
Desk Top Type


    KEDT 100 – 2M(2P)



    [Specification]

    KEDT 100 – 2M(2P)
    Kiyon offers customized Thermal Evaporator system integrated with its in-house designed
    Glovebox provides suitable for various applications. Minimize chamber size to maximize glovebox internal space.
    Chamber Ultimate Pressure

    Below than 3.0 x 10-7 Torr

    Chamber Working Pressure

    Piece to Max 170mm * 170mm Glass Below than 5.0 x 10-6 Torr within 30 Minutes
    Film Thickness Uniformity

    <+/-5% within 100mm * 100mm Glass (1” * 1” Glass 9ea)
    Loadlock Chamber for Sample Loading / Unloading (Without Destroying the Condition of Chamber Vacuum)
    Main Chamber for Save the High Vacuum Pumping Time
    System Fully Automation Control by PC Control Available
    System Semiauto Control & Manual Control by PLC Based Touch Control (10.5“ Touch Panel) :
    Auto Pumping, Auto Venting, Auto System Shut Down
    Auto Deposition Control & Co-deposition Process Available
    Sample Heating (Up to 300 ℃) / Cooling (Down to 5 ℃) Available

  • > Please Kiyon`s local customer center for more details