• Sample Rotation

[Specification]


• - Sample Holder Design for Easy Sample Replacement
• - Optimal Design for Improved Deposition Uniformity
• - AC Motor & Motor Controller : 1 Set
• - Rotation Speed : 1 ~ 20 rpm
• - Sample Heating (Up to 300 ℃) / Cooling (Down to 5 ℃) Available

• Sample Backside Cooling

• Sample Holder Design for Easy Sample Replacement
• Optimal Design for Improved Deposition Uniformity
• AC Motor & Motor Controller : 1 Set
• Rotation Speed : 1 ~ 20 rpm
• Sample Chuck Ass’y for Sample & Substrate Contact
• Cool Down Temp. : 5 ~ 10 ℃
• Special Cooling Block Cool Down Temp. : - 170 ℃
• Solenoid Valve Ass’y for Water Flow On/Off & Water Purge

• Sample Heating

• Improve surface resistance
• Improved deposition adhesion
• Sample Holder Design for Easy Sample Replacement
• Optimal Design for Improved Deposition Uniformity
• AC Motor & Motor Controller : 1 Set
• Rotation Speed : 1 ~ 20 rpm
• Heating Element : Halogen Lamp
• Heat Up Temp. : ~ 300 ℃