Product

Sputtering
Single chamber Sliding Door Type


    KSSD 100 – 2R1D(2P)



  • Sputtering ( Single chamber Sliding Door Type )

    Kiyon offers customized Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications. Compact design for Advantage of lab space.



    [Specification]

    Process Chamber Dimension

    450(W) * 450(D) * 400(H)

    Sample Size

    Piece to Max 100mm * 100mm Glass

    Cathode Size

    O.D 3” x 3 Sets
    Plasma Power Supply

    RF Power & DC Power Supply

    Chamber Ultimate Pressure

    Below than 5.0 x 10-7 Torr

    Chamber Working Pressure

    Below than 5.0 x 10-6 Torr within 30 Minutes

    Film Thickness Uniformity

    <+/-5% within 100mm * 100mm Glass
    Front Door for Sample Loading / Unloading In Glovebox Condition
    Rear Side Door for Chamber Maintenance & Cleaning (Without Destroying The Condition of The Glovebox)
    System Fully Automation Control by PC Control Available
    System Semiauto Control & Manual Control by PLC Based Touch Control (10.5“ Touch Panel) :
    Auto Pumping, Auto Venting, Auto System Shut Down
    Co-Sputtering Process Available
    Sample Heating (Up to 300 ℃) / Cooling ( Down to 5 ℃ ) Available

  • > Please Kiyon`s local customer center for more details