Semiconductor R&D

  • Glovebox Systems for Lithography

  • Used for R&D activities for Optical Sensor
  • Applying laminar flow system to maintain ultra-high cleanliness
  • Integrations of 4” ALD & Thermal Evaporation System
  • H/W & S/W Vibration Isolation technology

  • Integration of Photolithography with the glovebox system
  • H/W & S/W Vibration Isolation technology
  • Avoiding contact of sample with the atmosphere
  • Active Vibration Isolation Table
  • Applying technology to minimize pump vibration transmission
  • Bellows with special materials