Semiconductor R&D
- Glovebox Systems for Lithography
- Used for R&D activities for Optical Sensor
- Applying laminar flow system to maintain ultra-high cleanliness
- Integrations of 4” ALD & Thermal Evaporation System
- H/W & S/W Vibration Isolation technology
[Specification]
- Integration of Photolithography with the glovebox system
- H/W & S/W Vibration Isolation technology
- Avoiding contact of sample with the atmosphere
- Active Vibration Isolation Table
- Applying technology to minimize pump vibration transmission
- Bellows with special materials