Solar Cell R&D

  • Cluster-typed Tandem Evaporation System

  • R&D of Large-area Perovskite Solar Cells
  • Deposition Chamber for CTL (Charge Transport Layer)
  • Deposition Chamber for ALD (Atomic Layer Deposition)
  • Deposition Chamber for TCO (Transparent Conductive Oxide)
  • Automation (Transfer Robot )
  • Glovebox Integration for wet process (Sample size: M6) - Slot Die Coater and Spin Coater
  • Proven Records for Thickness Uniformity and Repeatability