Product

Thermal Evaporator
Single chamber Sliding Door Type

    KESD 170 - 2M2O(4P)



    KESD 170 - 2M2O(2P)



  • Thermal Evaporator ( Single chamber Sliding Door Type )

    Kiyon offers customized Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.



    [Specification]

    Process Chamber Dimension

    450(L)X355(H)X(450)

    Sample Size

    Piece to Max 170mm * 170mm Glass

    Chamber Ultimate Pressure

    Below than 3.0 x 10-7 Torr

    Chamber Working Pressure

    Below than 5.0 x 10-6 Torr within 30 Minutes

    Film Thickness Uniformity

    <+/-5% within 170mm * 170mm Glass


  • Front Door for Sample Loading & Source Refill In Glovebox Condition
  • Rear Side Door for Chamber Maintenance & Cleaning (Without Destroying The Condition of The Glovebox)
  • System Fully Automation Control by PC Control Available
  • System Semiauto Control & Manual Control by PLC Based Touch Control (10.5“ Touch Panel) : Auto Pumping, Auto Venting, Auto System Shut Down
  • Auto Deposition Control & Co-deposition Process Available
  • Sample Heating (Up to 300 ℃) / Cooling ( Down to 5 ℃ ) Available

  • > Please Kiyon`s local customer center for more details