Glovebox

Hermetically Sealed System

  • Hermetically Sealed System

    기본구성

    [ Transfer Module ]
  • Size: Per request e.g. 6900(W) x 1000(H) x 1200(D) mm

    [Getter Module]
  • Size: Per request e.g. 2000(W) x 1500(H) x 1800(D) mm

  • [ Purification System]
  • Oxygen/Moisture Removal to less than 1 ppm
  • Control: PLC Type (Heat, Vacuum, Purge, Refill)
  • Automatic pressure controller
  • Vacuum pump and Circulation Blower
  • Efficient Purification automatic regeneration process